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The paper discusses non-thermal plasmas, their generation and characteristics, formation mechanisms of ozone and the treatment of volatile organic compounds (VOCs). In the experimental part, undecane (C 11 H 24 as model VOCs) was treated with assistance of low temperature plasma at an atmospheric pressure which was generated in the so-called stack reactor. The gas composition was 13% of oxygen in nitrogen with impurities of carbon dioxide, carbon monoxide and undecane. The formation of by-products, as well as the removal efficiency, were investigated.