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We prepared zirconia thin films on (100) Si wafer by using a chemical solution deposition with a zirconium naphthenate as a starting material. The films were pyrolyzed at 500 o C for 10 min and finally annealed for 30 min in air at 500 o C. Amorphous films after annealing had no distinct structure and were uniform along the cross section line. In vitro formation of the calcium phosphate was evaluated by the field emission-scanning electron microscope, energy dispersive X-ray spectrometer and Fourier transform infrared spectroscopy.

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