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Micro particles and nanoparticles applied in microfluidics became a popular direction to improve biochip performance. Magnetic beads are the well-studied carriers including manipulation and surface modification, which could be easily to apply in biosensor development. A new methodology combined the actuators and sensor in the same chip all trigged by illumination is proposed in this study. A microfluidic chip with a-Si:H layer and ITO/glass with proper operation could be used to collect magnetic beads firstly and then following the optoelectrical measurement. In the meantime, 2D images for clusters of magnetic beads can be easily achieved with the addressable illumination. This proposed platform could own the high potential for a sensor array with better sensing performance.

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