Abstract:We proposed heterodyne angle deviation interferometry (HADI) for angle deviation measurements. The phase shift of an angular sensor (which can be a metal film or a surface plasmon resonance (SPR) prism) is proportional to the deviation angle of the test beam. The method has been demonstrated in bubble and speaker's vibration measurements in this paper. In the speaker's vibration measurement, the voltage from the phase channel of a lock-in amplifier includes the vibration level and frequency. In bubble measurement, we can count the number of bubbles passing through the cross section of the laser beam and measure the bubble size from the phase pulse signal.