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Microfluidics has emerged as an important research field with potential applications such as fluid control devices for micro-machines, micro-electronic cooling systems and liquid drug delivery devices. Micropump containing micro-sized functional structures, made mainly by micromachining technology, [1][2][3][4][5][6][7][8][9] is one of the most important microfluidic components. Different types of micropumps have shown advantages in specific applications. Compared to mechanical micropumps, the non-mechanical types, e.g., electrokinetic pumps, electrohydrodynamic pumps, magnetohydrodynamic pumps, phase transfer pumps, electro-wetting pumps and electrochemical pumps [1][2][3][4][5] (converting energy into the kinetic energy of the fluid) have typical transverse size order(s) of magnitude smaller, suitable as accurate low flow-rate pumps. For electrokinetic pumps, electric field is used for pumping the fluid, based on either the electrokinetic effect of electrophoresis (using electric field to drive charged species in a fluid) or electroosmosis (pumping the fluid through the surface charge of the channels under an electric field)

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