In this paper, a high stability liquid lens with optical path modulation function is designed and fabricated. The liquid lens has an outer chamber and an inner chamber, and the inner chamber has a structure with three annular anchoring layers. This structure can limit the sliding of the three-phase contact line under electrowetting effect and anchor the position of contact angle with a limited distance. The feasibility of this structure is verified by simulation and practice. The zoom imaging, contact angle, focal length and response time of the liquid lens are analyzed. The structure with three annular anchoring layers provides six anchored precision optical path modulation gears, and the optical path difference can be changed by mechanical hydraulic control, up to 1.17 mm. Widespread applications of the proposed liquid lens are foreseeable such as microscopic imaging and a telescope system, etc.

Liquid lens, especially electrowetting liquid lens, is filled with two immiscible liquids based on electrowetting on dielectric. The chamber structure of the liquid lens is generally cylindrical or conical and...

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