In this paper, high-gain cavity backed patch antenna arrays are proposed based on low temperature co-fired ceramic technology at 140 GHz. By introducing a substrate integrated cavity to the patch antenna element, the gain is enhanced by 3.3 dB. Moreover, a rectangular ring is loaded around the patch for better impedance matching and further gain enhancement. The final simulated maximum gain of the proposed antenna element is 9.8 dBi. Based on the proposed high-gain antenna element, a 4 × 4-element array and an 8 × 8- element array are presented. The 4 × 4-element array shows a measured maximum gain of 16.9 dBi with 9.5 GHz bandwidth (136.2–145.7 GHz) and the 8 × 8-element array shows a measured maximum gain of 21.8 dBi with 9.8 GHz bandwidth(136.7–146.5 GHz), respectively.

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