As the world steps into the era of Internet of Things (IoT), numerous miniaturized electronic devices requiring autonomous micropower sources will be connected to the internet. All‐solid‐state thin‐film lithium/lithium‐ion microbatteries (TFBs) combining solid‐state battery architecture and thin‐film manufacturing are regarded as ideal on‐chip power sources for IoT‐enabled microelectronic devices. However, unlike commercialized lithium‐ion batteries, TFBs are still in the immature state, and new advances in materials, manufacturing, and structure are required to improve their performance. In this review, the current status and existing challenges of TFBs for practical application in internet‐connected devices for the IoT are discussed. Recent progress in thin‐film deposition, electrode and electrolyte materials, interface modification, and 3D architecture design is comprehensively summarized and discussed, with emphasis on state‐of‐the‐art strategies to improve the areal capacity and cycling stability of TFBs. Moreover, to be suitable power sources for IoT devices, the design of next‐generation TFBs should consider multiple functionalities, including wide working temperature range, good flexibility, high transparency, and integration with energy‐harvesting systems. Perspectives on designing practically accessible TFBs are provided, which may guide the future development of reliable power sources for IoT devices.

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