In this paper, we propose a new ratio-metric interface for amplitude-modulated MEMS sensors based on mutually injection-locked oscillators (MILO). The two outputs are down-converted by a peak demodulator to improve the immunity to phase variation and noise. The peak values are then fed into a second-order discrete-time delta-sigma modulator that directly produces a digital ratio-metric output with a worstcase resolution greater than 16 bits and with input full scale of 0.6. The interface is clocked by the resonators output signal and is adapted for a sampling frequency up to 1MHz.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.