We report on the manufacturing, reliability, and optical functionality of multimode optical waveguide devices developed with a fast processable optical grade silicone. The materials show proven optical losses of <0.05 dB/cm @ 850 nm, surviving >2000 hours 85°C/85% relative humidity testing as well as >4 cycles of wave solder reflow. Fabrication speeds of <10 minutes are shown for a full waveguide stack.Step index 50×50 m waveguides were fabricated and passively MT connectorized on rigid FR4 and flexible polyimide substrates with precise alignment features (cut by dicing saw or ablated by UV laser). Two out-of-plane coupling techniques were demonstrated in this paper, a MT connectorized sample with a 45° turning lens as well as 45° dielectric mirrors on waveguides by dicing saw. Multiple connections between fiber and polymer waveguides with MPO and two out-of-plane coupling techniques in a complete optical link are demonstrated @ 10 Gbps data rates with commercial transceiver modules. Also, complex waveguide geometries such as turnings and crossings are demonstrated by QSFP + transceiver. The eye diagram analyses show comparable results in functionality between silicone waveguide and fiber formats.

To improve the 0.11μm DRAM capacity of foundry and save cost, with series of tests, we successfully transferred 0.11μm DRAM M0 (Bit Line) layer lithography process from the ArF(NA=0.7) process to high NA (0.8) KrF process.