A self-contained electro-optical module for scanning extreme ultraviolet (EUV) reflection microscopy at 13.5 nm wavelength has been developed. The system has been designed to work with stand-alone commercially available EUV high harmonic generation (HHG) sources through the implementation of narrowband harmonic selecting multilayers and off-axis elliptical short focal length zoneplates. The module has been successfully integrated into an EUV mask scanning microscope achieving diffraction limited imaging performance (84 nm point spread function).

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This paper deals with implementation of a MMS Communication stack library used in the processor and an IEC 61850 one chip communication stack processor of an IED used in a SAS server and a client. According to the definitions of IEC 61850 standards, communication services of SAS are divided mainly into three steps: initialization, processing and communication step. The three steps above defined in IEC 61850 standards are designed by using object-oriented programing language;C++. By using the IEC 61850 one chip communication stack processor, the processor makes it easy to manage and repair an IED, and supports compatibility between IEDs of different manufacturers. By using the IEC 61850 MMS communication stack library, not only user's development hours are reduced but also it contributes to the automation of substation.

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