A Chlorofluorocarbon was converted to a solid state substance for the purpose of nontoxic treatment and resource of specific freon waste. Experiments were performed by means of plasma polymerization from CFC 113 ( Trichlorotrifluoroethane ) and n-hexane mixtures. The maximum weight deposition rate of the film from CFC 113 and n-hexane is 1. S X 103 mg cm 2 s' at a two-one weight mixing ratio of CFC 113 and hexane in the flask tank. This deposition rate is about 10 times as large as that from n-hexane itself The 16% weight amount of gas mixture introduced into the reaction chamber was converted to polymeric film on the lower electrode at the preparation condition. Solidification recovery in the whole chamber was more than 50 %. Results of XPS and IR measurements indicate the existence of C-F and C-Cl covalent bonds in the films. UV-VIS spectra of the films were significantly different from that of n-hexane itself.