This article involves computer simulation and surface analysis by nuclear techniques, which are non-destructive. Both the "energy method of analysis" for nuclear reactions and elastic scattering are used. Energy spectra are computer simulated and compared with experimental data, giving target composition and concentration profile information. The method is successfully applied to thick flat targets of graphite, quartz and sapphire and targets containing thin films of aluminium oxide. Depth profiles of 12 C and 16 O nuclei are determined using (d,p) and (d,α) deuteron induced reactions. Rutherford and resonance elastic scattering of (4 He) + ions are also used.

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