This paper will introduce a piezoelectric micro membrane actuator with interdigitated (IDT) surface electrodes for polarization and actuation. The thus achieved polarization and generated electric field are highly inhomogeneous and cause therefore also inhomogeneous strain and stress distributions within the piezoelectric material itself. To equalize the strain and stress the material will deform. This deformation can be manipulated due to electrodes design and clamping of the membrane. The most outstanding achievement with this manipulation is the deflection of the membrane towards the actuated surface and not as is common in piezoelectric membrane actuators towards the passive surface of the device.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
customersupport@researchsolutions.com
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
Copyright © 2025 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.