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Titanium carbide (TiC) coated carbon limiters, which suffered 1972 shots of tokamak discharge and 672 shots of stellarator discharge in JIPPT-II for about 3 months, are analyzed by AES and RBS. The stoichiometry and composition of a subsurface layer is found to be affected by the plasma exposure. In this region a large amount of oxygen and nitrogen are observed. These concentration profiles and the subsurface layer affected have systematic positional dependencies on the limiter, suggesting an inhomogeneous interaction between the plasma and limiter. The analysis of RBS data gave roughly 0.4 and 0.2 C and Ti atoms, respectively, being sputtered off for every impinging O atom.

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