This paper presents a combined diamond disk that is designed and manufactured to markedly improve the leveling of diamond tips, thereby reducing the amount of diamond grit. First, a small brazed diamond disk was manufactured. Second, 12-or 24-disk brazed diamond disks were mounted onto a substrate with a diameter of 108 mm for completing the combined diamond disk. Four types of disks were fabricated, and their performances were compared with that of a conventional diamond disk. The experimental results showed that the combined diamond disk has more complete diamond crystal shapes and distribution with better leveling, which increases the effectiveness of the working diamond grits. Compared to a conventional diamond disk, the combined diamond disk achieved a higher wafer removal rate and better uniformity while consuming less pad material. The number of diamond grits required was significantly lower. Roughly, 7,600 and 12,000 diamond grits were used for the 24-and 12-disk brazed diamond disks, respectively, in the new disk, whereas 20,000 diamond grits were used in a conventional diamond disk. In the case of the conventional diamond disk, the diamond tips are leveled to more than 50 μm. However, in the case of the combined diamond disk, the diamond tips can be leveled to less than 30 μm because the diamond tips are already leveled. These results contribute to the understanding of conditioning techniques and further improvement of the chemical mechanical polishing process.
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