Decomposition of germanium monoxide (GeO) films under the impact of an atomic force microscope (AFM) tip was observed for the first time. It is known that GeO is metastable in the solid phase and decomposes into Ge and GeO(2) under thermal annealing or radiation impact. AFM tip treatments allow us to carry out local decomposition. A novel tip-induced local electrical decomposition (TILED) method of metastable GeO films has been developed. Using TILED of 10 nm thin GeO film, Ge nanowires on silicon substrates were obtained.

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