The results of investigations into the production methods of Gd(2)O(3), Eu(2)O(3), Er(2)O(3), Yb(2)O(3) films are presented. A description of the optical properties contains the optical constants n and k of the films evaporated by an electron-beam gun in the 0.2-9-microm wavelength range. Interpretations of the IR absorption bands is given.
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