Data are presented characterizing a new process for fabrication of vertical-cavity surface-emitting lasers based on the selective conversion of high Al composition epitaxial AlGaAs to a stable native oxide using ‘‘wet oxidation.’’ The native oxide is used to form a ring contact to the laser active region. The resulting laser active regions have dimensions of 8, 4, and 2 μm. The lowest threshold laser is achieved with the 8-μm active region, with a minimum threshold current of 225-μA continuous wave at room temperature.

This paper outlines yield improvements in the integration of damascene copper in low-k SiCOH intermetal dielectric at 65 nm dimensions. Large defect reductions were seen by RIE, wet cleans and CMP process optimization. RIE improvements led to reductions of thirty three percent for missing pattern defects while wet clean optimization resulted in more than a fifty percent reduction in metal voids. CMP carrier head changes provided a more corrosion resistant process and higher throughput. Additionally, a high performance M1 module that maintained process window for all sectors was developed.

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In the present paper, the effect of elliptical fin and its orientation were computationally examined by considering equivalent fin cross-sectional area and height of oblique fin to enhance thermal performance. A total of seven distinctly oriented elliptical fin microchannel models were developed and analyzed using finite volume method for velocity range of 0.2 to 0.9 m/s at constant heat flux of 65 W/cm 2 . The results showed that the elliptical fin microchannel model reduced pressure drop significantly and consumed less pumping power than the oblique fin microchannel model. It was also found that the average Nusselt number initially increases with decreasing elliptical fin orientation angle and then it rapidly decreases on further reduction of orientation angle beyond 4 . The optimal performance factor for a 4 elliptical fin was 1.21, with only a 6.5% penalty in wall temperature at Re 436.Furthermore, the maximum pumping power reduction of 41.4% was found for the 4 elliptical fin microchannel model with a 2.3% increase in Nusselt number. Hence, for the same pumping power, the 4 elliptical fin microchannel model performs better than oblique fin microchannel.