We report the structural and magnetization dynamics of pulsed laser ablated Y3Fe5O12 (YIG) thin films grown on Gadolinium gallium garnet (GGG[110]) substrate. The co-planar waveguide ferromagnetic resonance (CPW-FMR) measurements are performed to study the thickness and inhomogeneity effect on damping constant. we also estimated the effective demagnetization (4πMeff) value which was lower than that of single-crystalline bulk YIG. A detailed line width analysis revealed the significant TMS and inhomogeneity contribution to damping which varied for different thickness films. The Gilbert damping constant (α) of the grown film was found to be lowest in the case of 100nm film (≈3×10-4), and the corresponding inhomogeneous broadening (ΔHO) was recorded to be 77 Oe. Further angular measurements on 100nm thin film revealed the presence of strong uniaxial magnetic anisotropy (UMA) field of 735Oe at 10 GHz rf frequency.