Outgassing rate upon electron impact from the phosphor screen of a field emission microscope has been measured as a function of anode current and applied voltage. The outgassing rate increased quickly with anode voltage up to about 1.5 kV; after that it increased only slightly. At the practical anode voltage used in field emission experiments, the outgassing rate substantially depended on only emission current and was found to be 3 x 10-1 /e(Pa • m3/ s • m2). From this relationship, we conclude that if we use a In A or lower emission current there are few effects on the reading of pressure with a field emission vacuum gauge in UHV, and in XHV as well.
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