An aluminization process with controlled Al activity to form surface Ni(Al) zone was applied to fabricate ceramic nanorod array structures by using internal oxidation. The pack cementation with NaCl, Ni3Al and Al2O3 was adapted as the aluminization process to form surface Ni(Al) zone. With increasing Ni3Al concentration in pack powder mixture, Al content of surface Ni(Al) zone was increased. Nanorod array structures can be successfully obtained on Ni components with designed shape.

New route to fabricate a nano rod random-array structure was proposed. Nano Al2O3 rod array structure was fabricated by using internal oxidation and electropolishing of dilute Ni(Al) alloys. The diameter of Al2O3 rods ranges from 200 to 800 nm, depending on oxidation temperature and grinding depth before electropolishing. Length of Al2O3 rods can be controlled by electropolishing condition.

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