Multimode motion of Marangoni propulsion ships on a water surface as per a near-infrared, two-wavelength selective response is achieved for the first time. The ships are rhombus-or propellershaped polyacrylamide or siloxane resin-based gels in which Nd 2 O 3 and Yb 2 O 3 nanoparticles are incorporated separately for photothermal conversion at 808 and 980 nm, respectively. The rhombus geometry is for straight locomotion, and the propeller geometry is for rotation. On/off remote control of the forward and backward locomotion of a rhombus-shaped ship and of the clockwise and counterclockwise rotations of a propeller-shaped ship via irradiation with 808 or 980 nm near-infrared light is demonstrated. The nanoparticles are incorporated into the desired locations of the gels, enabling selective local heating of the gels without focusing the light. The temperature gradient of the ships by local heating, based on a photothermal conversion, generates a Marangoni propulsion force to move the ship in the desired direction.

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Lately, Semi Additive process has been considered to dry processing for the downsizing of the emiconductor packages. WET process is a process depending on the chemical reaction of the chemical solution. There are many problems with the formation of the minute redistribution layer. We repeated the study of the Photodesmear technology as a new technology of the dry process, reported result in IMAPS in 2013 and 2015. We completed a panel level experiment tool equipped with a high power irradiation light source. We reported findings of the coherency improvement by integrated dry process which fused in a Photodesmear technology and a dry seed technology. We confirmed the following effects in integrated dry process. Desmear of micro via was difficult at a panel level. We were able to keep flatness characteristics of the resin before the plating low. We were able to confirm strong coherence of the via filled plating. VUV light irradiation is effective for the residue that is left when removing the protective film before the pre-dry seed layer process. Integrated dry process is a key technology to establish the next generation semi additive process.

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