A concept of a multilink test scheme with a two-step probability plot and its statistical accuracy of estimation are investigated for the timedependent dielectric breakdown under defect clustering condition in the back end of line and middle of line. It is useful for obtaining an accurate estimation of lifetime that explains a complicated distribution shape due to impacts of clustered defects. Furthermore, applying a regression of the electric field dependence of breakdown to the lifetime distribution analysis will provide a more accurate estimation.

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