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We developed a new fabrication process for pen-shaped microneedle structures by using non-photolithographic pattern transfer. The process is a combination of anisotropic wet etching and a dicing technology that uses a saw. The process has an advantage, in which the needle diameter is easily changed by altering the groove profile formed in the dicing-saw process. We fabricated pen-shaped needle structures in a dense array for medical applications. The needle height was larger than 200 µm, and the pitch distance was about 200 µm in the experiments. The width of the needle ranged from 10 to 30 µm. The radius at the needle tip was less than 100 nm.