Ferroelectric BaTiO3 (BT) thin-film capacitors with a buffer layer of (Ba1−
x
Sr
x
)TiO3 (BST) have been fabricated on (001) SrTiO3 (STO) single-crystal substrates by a pulsed laser deposition method, and the crystal structure and polarization hysteresis properties have been investigated. X-ray diffraction reciprocal space mapping shows that the BST buffer effectively reduces the misfit strain relaxation of the BT films on SrRuO3 (SRO) electrodes. The BT capacitor with the SRO electrodes on the BST (x = 0.3) buffer exhibits a well-saturated hysteresis loop with a remanent polarization of 29 µC/cm2. The hysteresis loop displays a shift toward a specific field direction, which is suggested to stem from the flexoelectric coupling between the out-of-plane polarization and the strain gradient adjacent to the bottom interface.
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