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In vacuum ultraviolet (VUV) spectral region, coherent light sources are being thus in high demand for advanced precise and microscopic processing. A sub-picosecond VUV light source at 126 nm has been produced by the nonlinear wavelength up-conversion of a near infrared femtosecond Ti:Sapphire laser at 882 nm in rare gases. We obtained the maximum output of the 7 th harmonic at 126 nm in Xe at the pressure of around 2 Torr. The 126 nm beam will be amplified by an optical-field-ionization produced Ar 2 * medium and then high-power sub-picosecond VUV pulses will be obtained.

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