In this work, we report on an unprecedented design where digital, analog, and MEMS technologies are combined to realize a generalpurpose single-chip CMOS microsystem. The convergence of these technologies has enabled the development of a low power, portable microinstrument ideally suited for controlling environmental and bio-implantable sensors.
A single-chip implementation of a microinstrumentation system is presented. The chip incorporates voltage, current, and capacitive sensor interfaces; a temperature sensor; a lo-channel, 1%bit analog-to-digital converter; and an X-bit microcontroller with a 16-bit hardware multiplier and a 40-bit accumulator. Standard serial and parallel interfaces facilitate digital communication with a host system. Fabricated in a standard 0.35 l.trn digital CMOS process, the die occupies 3.8 mm x 4.1 mm, operates from a nominal supply voltage of 3 V, and draws 16 mA when fully powered (850 PA standby current). For testing purposes the chip is packaged in a 132-pin ceramic PGA.
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