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Asymmetric slits were designed to make channel length (L) of thin film transistor (TFT) narrower. Amorphous silicon TFTs, having various channel lengths in the range of 1.5μm to 4μm, were successfully fabricated by optimizing two different slit widths beyond its own resolution limitation of a exposure system. Also, characteristics of TFTs having channel length below 4μm were investigated in this paper.

Two-dimensional nozzle and ink feed hole arrangement in a monolithic thermal inkjet printhead for high-resolution and high-speed printing is proposed. A 60 x 60 nozzle array as a 2400 x 2400 dpi inkjet printhead (a chip size of 1 / 2 x 1/23 is successfully fabricated. Ink ejection results show ink dot diameter of 10-1 5 pm for current pulses of 30 mA and 2-12 ps. For the first time in the world, ink ejection suitable for 2400-dpi printing is achieved with a nozzle of IO-pm diameter and a cavity of 6-pl volume.

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