General aerosol-measuring instruments allow real-time measurements of air particle concentrations.However, these measurements cannot distinguish free particles from target nanomaterials because they do not differentiate nanomaterials. The purpose of this study is investigation of the quantitative nature of atmospheric nanoparticles using GED (Gas Exchange Device)-ICP-MS to detect and measure nanoparticles as an element. The per particle signal intensity increased proportionally to the volume until the particle size reaches 120 nm. For all particle sizes from 20 nm to 160nm, the measured values of FMPS (Fast Mobility Particle Sizer) were consistently higher than those for ICP-MS. The system will be able to adapt to an exposure assessment of CNT (Carbon Nanotube) because carbon-base materials can be identified and quantified as long as an index element can be found.