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The paper deals with an x-ray lithography station at the VEPP-3 storage ring of the Institute of Nuclear Physics (Novosibirsk) and some recent results are reported. The utilization of rather high quantum energies is shown not to deteriorate the quality of x-ray replication. The presented work is an extension of the studies that were performed at VEPP-2M [E. S. Gluskin, A. A. Krasnopyorova, G. N. Kulipanov, V. P. Naz’mov, V. F. Pindyurin, A. N. Skrinsky, and V. V. Chesnokov, Nucl. Instrum. Methods 208, 393 (1983)].

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