No abstract

Effects of a cesium ion beam on GaAs. InP, and Si (7) On InP, on which very pronounced sprouting ofInP crystals from ion bombardment with argon and xenon was observed (to be published), the use of cesium instead of a noble gas was found to reduce (though notprevent) sprouting. It is conduded that the presence of cesium can have a subduing influence on microtopography development.The observations show cesium to be an excellent decorating material for mapping defect distributions by SEM in the vicinity of sputtered structures.