Changes in the structure and stoichiometry of the p-CdTe surface as a result of etching have been studied by high-resolution x-ray photoelectron spectroscopy and the Rutherford backscattering method. Etching with bromine-methanol and bromine-butanol solutions is shown to enrich the surface with elementary tellurium (Te 0 ). The etching process is anisotropic, in particular, the extent of enrichment with Te 0 is not the same for A and B surfaces. Arguments are developed in favour of the heterophase nature of the etched surface. The presence of water in the etches leads to Te 0 oxidation in the course of etching. The mechanism of etching is discussed based on the data obtained.
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