Non-uniform optical illuminations near the Schottky interface of Ti/GaAs metal-semiconductor hybrid (MSH) structures induce local photovoltages transverse and lateral to the interface. In these VLSI-compatible, room temperature optical sensors, the optical response of the MSH resistance is directly linked to the Schottky barrier behavior. In order to correlate the interface behavior with the overall heterostructure behavior, quantities such as transverse photovoltage, lateral photovoltage, and resistance are all recorded as a function of laser spot location. The interface's photovoltaic dependence on intensity is consistent with a MSH in which quantum efficiency is independent of optical intensity.

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