A single-chip three-dimensional(3-D)Hall sensor for high-accuracy three-axismagnetic-field measurements is presented. The chip contains a 3-D Hall device, the analog signal conditioning circuit, an A/D converter and the digital signal-processing unit. The 3-D Hall device contains horizontal and vertical Hall elements. The horizontal Hall element measures the perpendicular component, and four vertical Hallelements measure the two in-plane components of a magnetic flux. With the detailed analysis of the essential factors affecting Hall voltage, the signal conditioning circuit based on spinning current technique is provided, which works in 100kHz and can cancel the offset, reduce the 1/f noise and amplify the signal. The digital signal-processing unit provides the high-accuracy mapping algorithm between measured values and target values.

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