A homemade apparatus was used to apply ultrasonic-vibration to assist the glass hot embossing processes. To operate at high temperatures for glass hot embossing, the ultrasonic vibration system was appropriately designed with an embedded cooling system, and an ultrasonic horn was specifically modified for hightemperature use. Molds with both V-groove and Fresnel structures were manufactured for hot embossing experiments on PSK-100 glass. The heights of the molded structures were increased significantly with the assistance of ultrasonic vibration. This technology demonstrates the capability to upgrade the performance of the glass hot embossing process.