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Two-dimensional ͑2D͒ nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene ͑PS͒ microspheres on an undoped ͑100͒ Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.