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The deuterium (D) bubbles formed in W exposed to high flux D plasma were researched by scanning electron microscopy and transmission electron microscopy. After D plasma exposure at 500 K and 1000 K, a layer of nano-sized bubbles were homogenously distributed in W subsurface region. The D bubbles were homogenously nucleated due to the high D concentration, and the nucleation process is not related to the vacancy defects. At low temperature (500 K), D bubbles can grow by surface blistering, which caused different nano scale morphologies on different surfaces. At high temperature (1000 K), D bubbles mainly grow by vacancy clustering, which caused pinholes on the surface.