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The wafer-level integration technique of PageWafer R (SAES Getters' solution for getter film integration into wafer to wafer bonded devices) has been tested in hermetically sealed miniature glass-Si-glass cells filled with Cs and Ne, e.g. for microelectromechanical systems (MEMS) atomic clock applications. Getter effects on the cell atmosphere are analyzed by quadruple mass spectroscopy and coherent population trapping (CPT) spectroscopy. The quadruple mass spectroscopy revealed that the residual gases (H 2 ,O 2 ,N 2 and CO 2 ) that are attributed to anodic bonding process are drastically reduced by the getter films while desirable gases such as Ne seem to remain unaffected. The impurity pressure in the getter-integrated cells was measured to be less than 4 × 10 −2 mbar, i.e. pressure 50 times lower than the one measured in the cells without getter (2 mbar). Consequently, the atmosphere of the getter-integrated cells is much more pure than that of the getter-free cells. CPT signals obtained from the getter-integrated cells are stable and are, in addition, similar to each other within a cell batch, suggesting the strong potential of applications of this getter film and especially for its wafer-level integration to MEMS atomic clocks and magnetometers.

A method for filling alkali vapor cells with cesium from a dispensing paste is proposed and its compliance with miniature atomic clock applications is evaluated. The paste is an organic-inorganic composition of cesium molybdate, zirconium-aluminum powder, and a hybrid organic-inorganic binder. It is compatible with collective deposition processes such as micro-drop dispensing, which can be done under ambient atmosphere at the wafer-level. After deposition and sealing by anodic bonding, cesium is released from the consolidated paste through local heating with a high power laser. Linear absorption signals have been observed over one year in several cells, showing a stable atomic density. For further validation of this technology for clock applications, one cell has been implemented in a coherent population trapping clock setup to monitor its frequency stability. A fractional frequency aging rate around –4.4 × 10−12 per day has been observed, which is compliant with a clock frequency instability below 1 × 10−11 at one day integration time. This filling method can drastically reduce the cost and the complexity of alkali vapor cell fabrication.