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A first-order measurement sensitivity analysis of a single mode, quartz resonator device model was conducted. This analysis predicts the variations in the motional arm resistance versus the resonance S-parameter as a function of measurement errors. The accuracy of this first-order sensitivity analysis is verified by computer simulation and experimentally. The model parameters were extracted following the recommended EIA-512 standard. The theoretical first-order sensitivity analysis, the computer simulation results, and the experimental measurements are found to be in good agreement.

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