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The absorption spectra of MoO3 amorphous thin films in the thickness range from 50 to 350 nm are studied as a function of thickness in the temperature range from 20 to 275°C. The validity of the Urbach rule is investigated and the related parameters are estimated. It is confirmed that absorption in these layers is due to non‐direct transitions. A decrease in optical energy gap with annealing is reported. The analysis of optical absorption edge as a function of temperature is discussed with particular reference to amorphous molybdenum trioxide films. The decrease in the optical energy gap with increasing substrate temperature is reported and discussed in terms of current theory.

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