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High performances surface acoustic wave (SAW) filters based on aluminium nitride (AlN)/diamond layered structure have been fabricated. The C-axis oriented aluminum nitride films with various thicknesses were sputtered on unpolished nucleation side of free-standing polycrystalline chemical vapor deposition (CVD) diamond obtained by silicon substrate etching. Experimental results show that high order modes as well as Rayleigh waves are excited. Experimental results are in good agreement with the theoretical dispersion curves determined by software simulation with Green's function formalism. We demonstrate that high phase velocity first mode wave (so-called Sezawa wave) with high electromechanical coupling coefficient are obtained on AlN/diamond structure. This structure also has a low temperature coefficient of frequency (TCF), and preliminary results suggest that a zero TCF could be expected.

Authorship statement : the submission of the manuscript has been approved buy all coauthors Prime Novelty:In this work we propose a new Surface acoustic wave structure (ZnO/AlN/diamond) leading to perform SAW devices combining high acoustic velocity and high electromechanical coupling coefficient. Theoretical as well as experimental results demonstrate the potentiality of this new structure.

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