Narrow-bandwidth 193-nm radiation is generated by stimulated Raman scattering and amplified in ArF to ≊100 mJ in a ≊5-ns pulse. Two-photon excitation of H2 results in 23 vacuum-ultraviolet lines down to 117 nm.

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A combination of a 32×32-element silicon-diode matrix and an Apple II computer is used to record and analyze Fabry–Perot interference ring patterns. The main advantage over conventional methods consists in the possibility of selecting the spectral resolution after registration and in the absence of alignment problems. Application of an image converter tube with VUV transmitting window in front of the matrix extends the applicability of the device to UV and VUV spectra.