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Complex studies are made of multilayer systems for superdense information recording including chemical composition analysis, investigation of magnetic and magneto‐optical properties, and electronmicroscopic studies of the structure. The systems based on thin film TbxFey alloys are produced by the rf‐sputtering method. The essential parameters of such systems are found to correlate with the conditions of the film production (argon pressure, bias voltage etc.). A substantial inhomogeneity of the chemical composition and structure of the films is observed.