H+ ion-implanted garnet films with a composition of (Y, Sm, Lu, Cah (Fe, Ge),012 have been laser annealed in ambient air. Annealed films were studied using ferromagnetic resonance (FMR) and X-ray techniques. A thermal model is proposed suitable with the experimental data. Emphasis on the differences of the laser annealing compared to a classical furnace annealing are presented. Hydrogen trapping has been observed to result from the high velocity of the quenching process.
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