In the semiconductor manufacturing industry, CD-SEM (Critical Dimension -Scanning Electron Microscope) is used for CD measurements on semiconductor wafers. In the CD-SEM, there is a program called "recipe" which is a series of files containing information on measurement conditions (i.e. where, how and what to measure). The recipe controls all of the parameters such as auto focus, pattern recognition and measurement parameters. Depending on the quality of this recipe, there is the possibility of errors in auto focus, pattern recognition and measurements. There are many ways in which to improve the quality of the recipe for better productivity. One method to obtain a higher quality recipe requires the use of a wafer and CD-SEM. When optimizing the recipe, the quality of improvements to the recipe depend heavily on the skill of the engineer, and wafer and CD-SEM conditions. In the semiconductor manufacturing Fab it is very time consuming to optimize recipe errors, as it requires wafer availability, arranging CD-SEM tool time, and analysis of root course of error.This paper discusses a recipe diagnostic tool to evaluate and analyze the root cause of recipe errors. This tool can provide not only analysis of the error root cause, but can also help the user determine how to improve the recipe quality by pinpointing the problematic recipe parameters. This will allow the user to properly select the parameters that need adjustment in order to obtain the best performance recipe possible. This method can reduce engineering time for recipe control by a factor of 10.

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The voice switching circuit (VS) is applied widely to various problems, including echo suppression and howling suppression in the communication equipment, realizing the magnified voice communication using microphones and loudspeakers. It is also applied frequently in recent years in combination with the echo canceller, in a form to complement the performance of the echo canceller.Kato et al. 131 discussed in detail the operational performance and the design method when VS is realized by the analog circuit, and proposed the automatic loss switchmg VS (ALS), where the switching loss is reduced by automatically adapting to the change of the acoustic and side-tone characteristics.In their method, however, A L S is constructed using 1 only the analog circuit. Ths makes the design complicated and makes it difficult to reduce the switching loss compared to the present design. With this in mind, the goal here is to realize the ALS function by program control, using the microprocessor (pP). The following two program-controlled VS with excellent voice communication functions are proposed:(1) VS applied to the whole speech band (type A);(2) the communication band is divided, and VS is applied tr> each of the divided subbands (type B).