Microplasmas breakdown of the InGaN/GaN heterostructures of different types of high-power light-emitting diodes is studied. It is shown that microplasma parameters, connected with reliability and such fabricating technology of the InGaN/GaN heterostructures as substrate material -Al 2 O 3 , SiC or Si, which determines the density of the critical extended defects, light flux, homogeneity of current spreading.
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