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The morphology of the relief of nanosized titanium films on the mica surface was studied using a scanning probe microscope at various scales. The characteristic features of the nanorelief of the surface of the investigated films, including fractal properties, are described. The obtained data on the fractal dimension are compared with the available experimental data, as well as the data obtained using scanning tunneling microscopy. Recommendations for the development of technology for «growing» structures with a given surface morphology are proposed.