Summary electrostatic force, and angular rate is detected as capacitance change between the resonator and its substrate.Mechanical Q factors for the driving and detecting modes of the polysilicon resonator are 2,800 and 16,000, respectively, at pressures below 0.1Pa. The test device worked in a vacuum, and output intensity was decreased at high ambient pressures.A noise-equivalent rate of 2deg/s was obtained at 1Pa.
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