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A technique for determining Young's modulus of vertically aligned carbon nanotubes using the refined micromechanical model of the nanoindentation of a forest of vertically aligned carbon nanotubes is developed. The results of experimental studies of Young's modulus determination for vertically aligned car bon nanotubes with different geometrical parameters are given. It is shown that, for a forest of carbon nano tubes with an effective diameter of around 100 nm and an effective length of approximately 2 μm, as well as for a forest with an effective diameter of carbon nanotubes of roughly 52 nm and their effective length of nearly 500 nm, the values of Young's modulus are 1.68 ± 0.08 and 1.01 ± 0.05 TPa, respectively. Our results can be used for developing the technological processes of the formation of structures for nano and micro electronics and nano and microsystem technology on the basis of vertically aligned carbon nanotubes.

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